Applied Materials
9500 XR Source Bushing
The Applied Materials 9500 XR Source Bushing is an X-ray shielded bushing used in metrology and inspection applications. The bushing is assigned multiple part numbers: 0240-91623, 0040-45296, 0040-91626, 0040-99250, and 0041-11325.[1][2]
What it is
General reference — not yet source-verifiedThe Applied Materials 9500 XR Source Bushing belongs to the class of source-region hardware used within metrology and inspection equipment. Machines of this class rely on stable generation and delivery of light, radiation, or another probing signal, and source bushings are part of the mechanical and environmental structure that supports that function.
Such components are not stand-alone production machines. Instead, they are precision internal elements that help maintain alignment, isolation, cleanliness, and repeatable source behavior inside systems that measure film properties, critical dimensions, pattern quality, overlay, surface condition, or defect presence.
Where it fits in the process flow
General reference — not yet source-verifiedMetrology and inspection tools appear at multiple points across semiconductor and related precision manufacturing flows. Such systems are used between process steps and after key patterning, deposition, etch, planarization, or cleaning operations to verify that the substrate meets control limits before additional value is added.
What do the numbers mean?
Configuration & options18
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the 9500 XR Source Bushing are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 9500 XR Source Bushing are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 9500 XR Source Bushing are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 9500 XR Source Bushing are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 9500 XR Source Bushing are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 9500 XR Source Bushing is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]waferpedia.com — waferpedia.comwaferpedia.com
Last updated Oct 15, 2026.
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