ASML
PAS 5500 100
What is it?
Why won't it start?
Documented failure modes, common issues, and field considerations.
- Lens damage; needs replacement due to water leak.
- Rust from water leak in the RH, LS sensor plat and near the stage.
- About 20 parts swapped out for other use.
- 6 missing boards.
- Missing modules in the ARMS.
- Lamp holder is missing.
What do the numbers mean?
Optics & imaging1
- Lens damage, needs replacement due to water leak[1]
Configuration & options5
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| PAS 5500/150 | i-line | — | Described as the successor to the PAS 5500/100 i-line system and optimized for high-volume semiconductor production. | web.archive.org[2] |
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
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Not publicly documented
The following facts about the PAS 5500 100 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the PAS 5500 100 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the PAS 5500 100 are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the PAS 5500 100 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the PAS 5500 100 are on record.
Answerable by: an OEM parts catalog or a service engineer
No publicly hosted manuals, SOPs, or datasheets for the PAS 5500 100 are on record.
Answerable by: university cleanroom staff or an OEM application specialist
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]inventory listing
- [2]web.archive.org — asml.com (Jan 25, 2006)web.archive.org
Last updated Jul 29, 2026.
