Edwards
The Edwards XDS 35 i is a dry scroll vacuum pump. The Edwards XDS 35 i has a peak pumping speed of 35 m3/h. The Edwards XDS 35 i has a nominal rotation speed of 1750 rpm.[1][2]

Dry scroll pumps are vacuum pumps used to create clean rough vacuum without oil in the pumping chamber. Dry vacuum pumps of this class are commonly used as standalone laboratory pumps or as backing pumps for higher-vacuum equipment.
The XDS35i family uses double start scroll form technology, and the enhanced versions add by-pass valves. The pump uses a bearing shield to separate process gases from bearing lubrication. The XDS35i family also uses a smart motor drive for pump protection, consistent performance, and remote start and stop capability. The XDS35i has a simple single sided scroll design. The XDS35i includes a high flow gas ballast feature for pumping vapours including water vapour at up to 240 gh-1.[1]
The Edwards XDS 35 i has a run and standby switch, a high and low voltage switch, an hour meter, and an onboard inverter that can be controlled remotely through a DB15 logic interface.[4]
Dry scroll pumps are typically placed at the rough vacuum layer of a tool set. Dry pumps of this class commonly evacuate chambers directly or serve as backing pumps for turbo pumps and other high-vacuum stages.
Dry scroll pumps are used where a clean foreline or chamber vacuum is needed for analytical instruments, laboratory systems, coating tools, and support vacuum duties. Dry pumps of this class are also used in processes that cycle chambers, handle vapors, or need oil-free backing service.
Documented failure modes, common issues, and field considerations.
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| XDS35i Enhanced | — | — | Uses bypass valves, has up to 20% lower peak power requirements during initial pump down, has up to 25% more pumping speed at roughing pressures, and is not limited for continuous full-speed pump down. | edwardsvacuum.com[1] |
| XDS35i NGB | — | — | No gas ballast version. | edwardsvacuum.com[1] |
| XDS35iC | — | — | Features Chemraz internal valves and stainless steel fittings. | edwardsvacuum.com[1] |
| XDS35iE | — | — | Enhanced version. | edwardsvacuum.com[1] |
| XDS35iE NGB | — | — | Enhanced no gas ballast version. | edwardsvacuum.com[1] |
| XDS35iCE | — | — | Enhanced version with Chemraz internal valves and stainless steel fittings. | edwardsvacuum.com[1] |
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The following facts about the XDS 35 i are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the XDS 35 i are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the XDS 35 i are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the XDS 35 i is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the XDS 35 i are on record.
Answerable by: an OEM parts catalog or a service engineer
No publicly hosted manuals, SOPs, or datasheets for the XDS 35 i are on record.
Answerable by: university cleanroom staff or an OEM application specialist
Last updated Oct 19, 2026.
The Applied Materials 0010-13627 is a high efficiency RF match designed for semiconductor equipment.
General referenceThe Applied Materials 0015 20064 Part is an identified component within the lab and support equipment category, used in a supporting role around semiconductor manufacturing and processing tools.