EV Group
610
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The EVG 610 is a compact, multi-purpose R&D mask alignment system. The EVG 610 supports top-side and bottom-side alignment. The EVG 610 handles substrate sizes up to 200 mm.[1][2]
What it is
The EVG 610 is a mask alignment system. The EVG 610 is a compact multi-purpose R&D system. The EVG 610 can handle small substrate pieces and wafers up to 200 mm. The EVG 610 supports standard lithography processes and offers optional back-side alignment. The EVG 610 also offers bond alignment and nanoimprint lithography capability.[1][4]
How it works
The EVG 610 supports vacuum contact, hard contact, soft contact, and proximity exposure modes. The EVG 610 provides top-side and bottom-side alignment capability. The EVG 610 includes a high-precision alignment stage, automated wedge compensation, and a motorized recipe-controlled exposure gap. The EVG 610 can use either a mercury light source or a UV LED light source.[1]
Applications
General reference — not yet source-verifiedMask aligners are used for patterned resist definition on wafers, chips, and other flat substrates in microfabrication and related device work. Double-sided capability is useful when features on opposite faces must be registered for through-substrate structures, cavity formation, backside patterning, or later bonding steps. Nanoimprint-capable variants extend the same platform toward replicated surface-relief patterning in imprintable materials.
What do the numbers mean?
Vacuum & pumping1
Wafer handling3
- Alignment accuracy
- Top side alignment ≤ ±0.5 µm; bottom side alignment ≤ ±2.0 µm; IR alignment ≤ ±2.0 µm depending on substrate material; bond alignment ≤ ±2.0 µm; NIL alignment ≤ ±2.0 µm[1]
- Manual-alignment note
- The EVG 610 wafer bond aligner manual states that the equipment can align and mount both 4 inch and 6 inch wafers[2]
Optics & imaging4
Performance2
Control & software4
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Exposure setupVacuum contact / hard contact / soft contact / proximity mode[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Which exposure modes does the EVG 610 support?
The EVG 610 supports vacuum contact, hard contact, soft contact, and proximity exposure modes.[1]
Not publicly documented
The following facts about the 610 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 610 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 610 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 610 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 610 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 610 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (5)Every fact above is drawn from these public sources
- [1]evgroup.com — evgroup.comevgroup.com
- [2]epfl.ch — epfl.chepfl.ch
- [3]aggiefab.tamu.edu — aggiefab.tamu.eduaggiefab.tamu.edu
- [4]EVG®610 — evgroup.comevgroup.com
- [5]Baxter Drying Ovens - AggieFab Nanofabrication Facility — aggiefab.tamu.eduaggiefab.tamu.edu
Last updated Oct 19, 2026.
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