KLA
Candela CS 20
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The KLA Candela CS 20 is a metrology and inspection tool family. The KLA Candela CS 20 Surface is a 6-inch wafer surface inspection system. The KLA Candela CS 20 Surface is an optical non-patterned wafer defect inspection system.[1][2]
How it works
The KLA Candela CS 20 Surface uses optical inspection. The KLA Candela CS 20 Surface has an optics figure of 83 nm. The KLA Candela CS 20 Surface has a minimum detectable defect size of 0.3 µm PSL sphere equivalent at a capture rate of at least 95% on bare silicon. The KLA Candela CS 20 Surface supports substrate diameters from 50.8 mm to 200 mm. The KLA Candela CS 20 Surface supports thicknesses from 350 µm to 1,100 µm.[2]
Where it fits in the process flow
The KLA Candela CS 20 Surface is intended for bare non-patterned silicon wafer surface defect detection. The KLA Candela CS 20 Surface has a throughput of 30 WPH for 150 mm wafers and 27 WPH for 200 mm wafers.[2]
Applications
What do the numbers mean?
Power & electrical4
Wafer handling5
Optics & imaging2
Configuration & options7
- Minimum detectable defect size
- 0.3 µm (PSL sphere equivalent, ≥95% capture rate on bare Si)[2]
Vintage & configurations
Documented models & variants
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Candela CS 20 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Candela CS 20 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Candela CS 20 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Candela CS 20 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Candela CS 20 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Candela CS 20 are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (5)Every fact above is drawn from these public sources
- [1]waferpedia.com — waferpedia.comwaferpedia.com
- [2]waferpedia.com — waferpedia.comwaferpedia.com
- [3]Inventory photo
- [4]Equipment inventory listing
- [5]Equipment inventory listing
Last updated Oct 20, 2026.
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