Waferpedia

KLA

HRP 220 Computer

Metrology & InspectionKLA HRP 220 family
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Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The KLA HRP 220 Computer is a metrology and inspection tool. The KLA HRP 220 Computer is a full PC set that includes a Tencor Board with an installed program.[1][2]

KLAHRP 220 Computer
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What it is

General reference — not yet source-verified

A metrology and inspection computer in semiconductor manufacturing typically provides the control, interface, and data-handling functions needed to operate or support measurement and defect-inspection tasks. Such systems commonly sit alongside process tools or inspection subsystems and help manage recipes, signal acquisition, result display, and tool communication.

How it works

The KLA HRP 220 Computer includes a Tencor Board and an installed program as part of its full PC set configuration.[2][1]

Where it fits in the process flow

General reference — not yet source-verified

Metrology and inspection systems are typically used around process steps where wafers or samples need dimensional, surface, defect, or condition checks before or after fabrication operations. Such equipment commonly supports process monitoring, engineering evaluation, and disposition decisions that connect manufacturing steps with measurement feedback.

Applications

General reference — not yet source-verified

Metrology and inspection computer systems are generally used where semiconductor manufacturing requires collection, organization, and review of measurement or inspection information. Such systems can support operator interaction, program execution, and data handling for process development, line monitoring, and quality-related analysis.

What do the numbers mean?

Control & software3

Full PC set (Include Tencor Board) with Installed Program[2]
Accurate?
Equipment type
Computer[2]
Accurate?
Control & software
Full PC set (Include Tencor Board) with Installed Program[1]
Accurate?
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What category is the KLA HRP 220 Computer in?

The KLA HRP 220 Computer is in the metrology and inspection category.[1]

Not publicly documented

The following facts about the HRP 220 Computer are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the HRP 220 Computer are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the HRP 220 Computer are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the HRP 220 Computer are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the HRP 220 Computer are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the HRP 220 Computer is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]waferpedia.com — waferpedia.comwaferpedia.com
  2. [2]inventory listing
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Last updated Oct 17, 2026.

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