KLA
Quantox 64100 Measurement
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The KLA Quantox 64100 Measurement is a measurement system for semiconductor manufacturing. The KLA Quantox 64100 Measurement is a KLA model. The KLA Quantox 64100 Measurement has two open cassette stations.[1][2]
What it is
How it works
Where it fits in the process flow
General reference — not yet source-verifiedMetrology and inspection systems are used between major process steps rather than to change the wafer directly. Such tools are commonly placed after deposition, lithography, etch, clean, or planarization operations so engineers can check whether the preceding process produced the intended result before the wafer proceeds downstream.
Applications
The KLA Quantox 64100 is used in semiconductor manufacturing as a measurement system.[1]
What do the numbers mean?
Wafer handling3
- Two open cassette station[2]
Configuration & options5
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Quantox 64100 Measurement are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Quantox 64100 Measurement are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Quantox 64100 Measurement are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Quantox 64100 Measurement are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Quantox 64100 Measurement are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Quantox 64100 Measurement is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (5)Every fact above is drawn from these public sources
- [1]waferpedia.com — waferpedia.comwaferpedia.com
- [2]Inventory photo
- [3]Inventory photo
- [4]Equipment inventory listing
- [5]KLA-Tencor Quantox64100 | SPS Global — semi-sps.comsemi-sps.com
Last updated Oct 20, 2026.
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