KLA

RS 75 Sheet Resistance Measurement

KLA RS 75 family

Research Quality: 30% complete

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RS 75 Sheet Resistance Measurement — Inventory photo — Fig. 01RS 75 Sheet Resistance MeasurementInventory photo^[1]

Plate 01KLA Tencor Prometrix RS75/tca Four Point Probe System (ID# 3921)
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Plate 02KLA Tencor Prometrix RS75/tca Four Point Probe System (ID# 3916)
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Plate 03KLA Tencor Prometrix RS75/a Four Point Probe System (ID# 4086)
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Power

115 Volts^[1]

Performance

< 0.2% (1σ)^[2]

What is it?

The KLA RS 75 is a sheet resistance measurement equipment model.

What do the numbers mean?

Power & electrical2

115 Volts^[1]

Accurate?

50/60 Hz^[1]

Accurate?

Wafer handling5

With Auto Loader^[2]

Accurate?

Optional 100-200 mm Open Cassette^[2]

Accurate?

Cassette to Cassette Handling^[2]

Accurate?

Analyze sheet resistance data on various conductive layers (such as implants, diffusion, epi, CVD, metals, & bulk substrates)^[2]

Accurate?

Provides accurate and repeatable sheet resistance measurements on 2-inch to 8-inch wafers^[2]

Accurate?

Performance4

Repeatability (VLSI): < 0.2% (1σ)^[2]
Accuracy (VLSI): ±1%^[2]
Throughput (5-site): 100 WPH^[2]
Alignment System: Notch/Flat aligner on Probe Arm^[2]

Control & software1

Computer OS: DOS Software: Rev 6.22^[2]

Configuration & options4

Fully Refurbished^[2]; Meets OEM Specifications^[2]
Measurement Range: 5 mΩ/sq - 5 MΩ/sq^[2]
Edge Exclusion: 3 mm from edge of film^[2]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Configuration115 Volts^[1]
Configuration50/60 Hz^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the RS 75 Sheet Resistance Measurement are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the RS 75 Sheet Resistance Measurement are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the RS 75 Sheet Resistance Measurement are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the RS 75 Sheet Resistance Measurement are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the RS 75 Sheet Resistance Measurement are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the RS 75 Sheet Resistance Measurement is not on record.
Answerable by: an OEM datasheet or a fab qualification report