RTE 221 Chiller

A recirculating chiller is support equipment that conditions and circulates temperature-controlled liquid for other tools. Chillers in semiconductor and laboratory settings are commonly used to remove heat from process chambers, power electronics, lasers, analytical instruments, and other subsystems that need stable thermal conditions. A chiller is generally not a direct process tool, but a utility subsystem that supports process stability and equipment uptime.

The Neslab RTE 221 Chiller uses a Z pump. The Neslab RTE 221 Chiller is configured as a single-phase unit operating at 115 V, 60 Hz, with 16 A current and 14 A heater current.^[1][2][4][3]

A support chiller sits alongside fab and laboratory tools rather than inside a single patterning, deposition, etch, or metrology sequence. Chillers of this class are connected where a host tool or subsystem requires circulating coolant for thermal control. A chiller may therefore support equipment before, during, or after wafer processing, depending on which host system it serves.

Recirculating chillers are used wherever semiconductor or laboratory equipment needs stable removal of waste heat and controlled coolant delivery. Chillers of this class can support thermal management for process tools, inspection tools, analytical instruments, light sources, vacuum hardware, and electronic assemblies. Stable coolant temperature from a chiller helps reduce thermal drift, protect temperature-sensitive assemblies, and keep host equipment within intended operating conditions.