Nikon
NWL 860 Wafer
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
How it works
The NWL 860 series is a single cassette wafer loader. The NWL 860 series includes pattern side macro inspection capability as a standard function. The NWL 860 series can also perform back side periphery and center macro inspections. The NWL 860 series allows wafer rotation speed and tilt angle to be set automatically or manually. The NWL 860 series uses a non contact centering mechanism. The NWL 860 series uses a multi arm system for loading and unloading wafers. The NWL 860 series uses a dialog type operating system with an LCD panel. The NWL 860 series can optionally add a data communication function conforming to SEMI SECS standards through an RS-232C interface or by remote control. The NWL 860 series keeps the vacuum chuck on during power off and returns the wafer to the cassette when power is switched on again.[6]
Applications
The NWL 860 series is intended for macro inspection tasks. The NWL 860 series is used for inspecting semiconductor patterns with higher steps and increasing layers. The NWL 860 series performs pattern side inspection and back side periphery and center inspections.[6]
Why won't it start?
Documented failure modes, common issues, and field considerations.
- An error message appears on the LCD panel if an error occurs.
- The vacuum chuck stays ON when power is turned OFF.
What do the numbers mean?
Power & electrical2
- 50/60 Hz[1]
Wafer handling2
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the NWL 860 Wafer are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NWL 860 Wafer are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the NWL 860 Wafer are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the NWL 860 Wafer are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the NWL 860 Wafer is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the NWL 860 Wafer are on record.
Answerable by: an OEM parts catalog or a service engineer
Sources & citations
Sources (6)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]Inventory photo
- [4]Inventory photo
- [5]waferpedia.com — waferpedia.comwaferpedia.com
- [6]Nikon NWL-860 IC Inspection Wafer Loader User Manual — generalmanual.comgeneralmanual.com
Last updated Oct 16, 2026.
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