Onto Innovation

MetaPulse 200 XCu Metal Film Measurement

Wafer Mapping Onto Innovation MetaPulse 200 family

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MetaPulse 200 XCu Metal Film Measurement — Inventory photo — Fig. 01MetaPulse 200 XCu Metal Film MeasurementInventory photo^[1]

Wafer size

Wafer Mapping

Vacuum

Vacuum Required 0.98 in Hg (24.89 mm Hg)^[1]

Optics

Micro Spot Optics^[1]

What is it?

The Onto Innovation MetaPulse 200 XCu Metal Film Measurement System is a contactless metal thickness measurement tool with wafer mapping, micro spot optics, multi-layer film capacity, and a PC controller.

Why won't it start?

Documented failure modes, common issues, and field considerations.

The laser is broken and needs replacement

What do the numbers mean?

Vacuum & pumping4

Operating Air Pressure 14.00 PSI (96,534.20 N/sq m)^[1]; Vacuum Required 0.98 in Hg (24.89 mm Hg)^[1]
Operating Air Pressure: 14.00 PSI (96,534.20 N/sq m)^[1]
Vacuum Required: 0.98 in Hg (24.89 mm Hg)^[1]

Wafer handling3

6" chuck^[1]
Wafer size: Wafer Mapping^[1]; 5" Chuck^[2]

Optics & imaging2

Micro Spot Optics^[1]

Accurate?

The Laser is broken and needs replacement^[2]

Accurate?

Control & software1

Controller Type: PC Controller^[1]

Dimensions & facilities3

Cooling Water Required Minimum Flow: 0.79 GPM (3.00 l/m)^[1]
External Cooling: Water Cooled^[1]
Cooling Water Required: Minimum Flow: 0.79 GPM (3.00 l/m) Min Temp: 12 *C (54 *F, 285.00 *K) Max Temp: 20 *C (68 *F, 293 *K)^[1]

Configuration & options7

Non copper tool; double path tool delay stage^[1]
Min Temp: 12 *C (54 *F, 285.00 *K)^[1]
Max Temp: 20 *C (68 *F, 293 *K)^[1]; Contactless metal thickness measurement^[1]; Multi-Layer Film Capacity^[1]; Copper / Double Delay Stage^[2]; 2 Loadports for 6/8 inch^[2]

Interested in this tool?

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

ConfigurationOperating Air Pressure 14.00 PSI (96,534.20 N/sq m)^[1]
ConfigurationVacuum Required 0.98 in Hg (24.89 mm Hg)^[1]
Operating Air Pressure14.00 PSI (96,534.20 N/sq m)^[1]
Vacuum Required0.98 in Hg (24.89 mm Hg)^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the MetaPulse 200 XCu Metal Film Measurement are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the MetaPulse 200 XCu Metal Film Measurement are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the MetaPulse 200 XCu Metal Film Measurement are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the MetaPulse 200 XCu Metal Film Measurement are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the MetaPulse 200 XCu Metal Film Measurement is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the MetaPulse 200 XCu Metal Film Measurement are on record.
Answerable by: an OEM parts catalog or a service engineer