Pfeiffer
The Pfeiffer Alcatel ADP 122 P is a dry vacuum pump. The Pfeiffer Alcatel ADP 122 P uses 208/480V, 3-phase power. The Pfeiffer Alcatel ADP 122 P has an Edition 04 option.[1][2]

Dry vacuum pumps evacuate chambers and gas lines without using oil in the swept process volume. Dry vacuum pumps are used as support equipment for process tools and vacuum subsystems wherever a clean rough or medium vacuum source is needed.
Dry vacuum pumps generally remove gas by mechanically compressing and transporting it from an inlet connected to a chamber toward an exhaust connection. Dry pump designs for semiconductor and laboratory support duty are commonly chosen when process cleanliness, particulate control, and reduced backstreaming risk matter.
Dry vacuum pumps are typically installed beneath, beside, or near process tools that need chamber evacuation, transfer-chamber pumping, or foreline support. Dry vacuum pumps commonly sit between the process chamber and downstream exhaust handling hardware, serving as a utility element rather than as the primary process module.
Dry vacuum pumps are used wherever process tools need chamber pumpdown, pressure reduction, gas removal, or transfer support in clean vacuum service. Dry vacuum pumps in fabrication and laboratory environments often support deposition, etch, implant, and chamber handling tasks.
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The following facts about the Alcatel ADP 122 P Dry Vacuum are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Alcatel ADP 122 P Dry Vacuum are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Alcatel ADP 122 P Dry Vacuum are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Alcatel ADP 122 P Dry Vacuum are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Alcatel ADP 122 P Dry Vacuum are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Alcatel ADP 122 P Dry Vacuum is not on record.
Answerable by: an OEM datasheet or a fab qualification report
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Last updated Oct 20, 2026.
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