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Pfeiffer

Alcatel ADP 122 P Dry Vacuum

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The Pfeiffer Alcatel ADP 122 P is a dry vacuum pump. The Pfeiffer Alcatel ADP 122 P uses 208/480V, 3-phase power. The Pfeiffer Alcatel ADP 122 P has an Edition 04 option.[1][2]

Alcatel ADP 122 P Dry Vacuum — Inventory photo
Fig. 01Alcatel ADP 122 P Dry VacuumInventory photo[1]

Power

208/480V[1]

Vacuum

Pump powers on and runs[1]

What it is

General reference — not yet source-verified

Dry vacuum pumps evacuate chambers and gas lines without using oil in the swept process volume. Dry vacuum pumps are used as support equipment for process tools and vacuum subsystems wherever a clean rough or medium vacuum source is needed.

How it works

General reference — not yet source-verified

Dry vacuum pumps generally remove gas by mechanically compressing and transporting it from an inlet connected to a chamber toward an exhaust connection. Dry pump designs for semiconductor and laboratory support duty are commonly chosen when process cleanliness, particulate control, and reduced backstreaming risk matter.

Where it fits in the process flow

General reference — not yet source-verified

Dry vacuum pumps are typically installed beneath, beside, or near process tools that need chamber evacuation, transfer-chamber pumping, or foreline support. Dry vacuum pumps commonly sit between the process chamber and downstream exhaust handling hardware, serving as a utility element rather than as the primary process module.

Applications

General reference — not yet source-verified

Dry vacuum pumps are used wherever process tools need chamber pumpdown, pressure reduction, gas removal, or transfer support in clean vacuum service. Dry vacuum pumps in fabrication and laboratory environments often support deposition, etch, implant, and chamber handling tasks.

What do the numbers mean?

Power & electrical11

208/480V[1]
Accurate?
Phase
3 Phase[1]
Accurate?
Currently wired for 208V[1]
Accurate?
Power
208/480V[1]
Accurate?
Current wiring
Currently wired for 208V[1]
Accurate?
Pumping speed at 50 Hz
95 m3/h[2]
Accurate?
Pumping speed at 60 Hz
112 m3/h[2]
Accurate?
Ultimate pressure at 50 Hz
3 x 10 -2 mbar[2]
Accurate?
Ultimate pressure at 60 Hz
1.5 x 10 -2 mbar[2]
Accurate?
Power
200 / 240 / 380 / 415 - 50 Hz; 200 / 240 / 380 / 480 - 60 Hz[2]
Accurate?
Power
208/480V, 3 Phase[1]
Accurate?

Vacuum & pumping5

Pump powers on and runs[1]
Accurate?
Pump was fully serviced and certified 01/2021[1]
Accurate?
Equipment type
Dry Vacuum Pump[1]
Accurate?
Condition
Pump powers on and runs[1]
Accurate?
Exhaust port
NW 40[2]
Accurate?

Dimensions & facilities1

Weight
400 lbs[2]
Accurate?

Configuration & options9

Edition 04[1]
Accurate?
Oil type
Fomblin[1]
Accurate?
Make
Pfeiffer / Alcatel[1]
Accurate?
Model
ADP 122 P[1]
Accurate?
Service date
Fully serviced and certified 01/2021[1]
Accurate?
Water cooling flow
1.5 l/h[2]
Accurate?
Inlet
NW 50[2]
Accurate?
N2 Purge Option[2]
Accurate?
Service status
Fully serviced and certified 01/2021[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Configuration208/480V[1]
  • Phase3 Phase[1]
  • ConfigurationPump powers on and runs[1]
  • ConfigurationCurrently wired for 208V[1]
  • ConfigurationPump was fully serviced and certified 01/2021[1]
  • Equipment typeDry Vacuum Pump[1]
  • Power208/480V[1]
  • ConditionPump powers on and runs[1]
  • Current wiringCurrently wired for 208V[1]
  • Pumping speed at 50 Hz95 m3/h[2]
  • Pumping speed at 60 Hz112 m3/h[2]
  • Ultimate pressure at 50 Hz3 x 10 -2 mbar[2]
  • Ultimate pressure at 60 Hz1.5 x 10 -2 mbar[2]
  • Power200 / 240 / 380 / 415 - 50 Hz; 200 / 240 / 380 / 480 - 60 Hz[2]
  • Exhaust portNW 40[2]
  • Power208/480V, 3 Phase[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What pumping speed is specified for the ADP 122 P?

The ADP 122 P has a peak pumping speed of 95 m3/h at 50 Hz and 112 m3/h at 60 Hz.[2]

What ultimate pressure is specified for the ADP 122 P?

The ADP 122 P has an ultimate pressure of 3 x 10 -2 mbar at 50 Hz and 1.5 x 10 -2 mbar.[2]

Not publicly documented

The following facts about the Alcatel ADP 122 P Dry Vacuum are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Alcatel ADP 122 P Dry Vacuum are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Alcatel ADP 122 P Dry Vacuum are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Alcatel ADP 122 P Dry Vacuum are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Alcatel ADP 122 P Dry Vacuum are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Alcatel ADP 122 P Dry Vacuum is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]ajvs.com — ajvs.comajvs.com
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Last updated Oct 20, 2026.

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