DSP9000

The Riber DSP9000 is a pressure controller for gas distribution systems used with gas-source MBE, hydride-source MBE, CBE, and MOMBE processes. The Riber DSP9000 is a flexible, microprocessor-based PID controller. The Riber DSP9000 can operate in local mode through a menu-based dialogue or in remote mode through a host computer via an RS-422 or RS-232 network interface.^[1][2]

In gas delivery hardware for epitaxy, pressure control regulates source flow indirectly by holding a defined upstream pressure across a known restriction. A controller of this class works with valves, pressure sensing, purge paths, and vent paths so that reactive gases can be stabilized before introduction to the growth chamber. A pressure controller in this role is part of the gas handling architecture rather than the deposition chamber itself.

The DSP9000 fits into pressure-regulated gas introduction lines used during gas-source MBE, hydride-source MBE, CBE, and MOMBE processes. The surrounding gas distribution systems are designed for high-purity gas handling, with modular flow components and manifolds placed to reduce dead volumes that could entrap particles or release impurities. The gas systems use 316L stainless steel tubing, automatic orbital butt-welded VCR fittings, micro-fittings between tubes, and electropolished and passivated internal surfaces with at least 0.4 µm Ra interior finish. The external leak rate is less than 5 x 10-10 atm.cm3/s.^[1]

A pressure controller of this class is used wherever an epitaxy tool relies on controlled delivery of reactive gases or vapors rather than only solid evaporation sources. Such hardware is relevant to compound semiconductor growth, dopant introduction, and source switching in gas-fed epitaxial processes. The same class of equipment also supports purge and vent sequencing that helps separate process delivery from line conditioning.