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Semitool

880 S M-Tek SRD

Wet Processing / CleanSemitool 880 family
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Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

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What it is

The Semitool 880 S M-Tek SRD is a spin rinse dryer for semiconductor wet processing and clean operations.[1][2]

How it works

General reference — not yet source-verified

A spin rinse dryer removes liquid from processed wafers or similar substrates by combining rinsing with centrifugal drying.

A spin rinse dryer typically holds the substrate in a rotating chamber, uses rinse fluid to clean the surface, and then relies on spin action to shed remaining liquid.

Where it fits in the process flow

General reference — not yet source-verified

The Semitool 880 S M-Tek SRD sits in wet process and clean steps where surfaces must be rinsed and dried after processing.

The Semitool 880 S M-Tek SRD is used after liquid-based process steps and before later handling that benefits from a dry surface.

Applications

The Semitool 880 S M-Tek SRD is used in semiconductor manufacturing wet processing and clean workflows.[1][2]

What do the numbers mean?

Configuration & options11

right hand[1]
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left hand[2]
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OEM
Semitool[1]
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Model
880 S M-Tek[1]
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Equipment type
Spin Rinse Dryer (SRD)[1]
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Handedness
right hand[1]
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Handedness
left hand[2]
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Asset #
80627[1]
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Asset #
80626[2]
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Last Confirm Date
June 26, 2024[2]
Accurate?
Make
Semitool[1]
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What type of equipment is the Semitool 880 S M-Tek SRD?

The Semitool 880 S M-Tek SRD is a spin rinse dryer.[1][2]

Not publicly documented

The following facts about the 880 S M-Tek SRD are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 880 S M-Tek SRD are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 880 S M-Tek SRD are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 880 S M-Tek SRD are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 880 S M-Tek SRD are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 880 S M-Tek SRD is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
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Last updated Oct 18, 2026.

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