Semitool
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A spin rinse dryer removes liquid from processed wafers or similar substrates by combining rinsing with centrifugal drying.
A spin rinse dryer typically holds the substrate in a rotating chamber, uses rinse fluid to clean the surface, and then relies on spin action to shed remaining liquid.
The Semitool 880 S M-Tek SRD sits in wet process and clean steps where surfaces must be rinsed and dried after processing.
The Semitool 880 S M-Tek SRD is used after liquid-based process steps and before later handling that benefits from a dry surface.
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The following facts about the 880 S M-Tek SRD are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 880 S M-Tek SRD are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 880 S M-Tek SRD are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 880 S M-Tek SRD are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 880 S M-Tek SRD are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 880 S M-Tek SRD is not on record.
Answerable by: an OEM datasheet or a fab qualification report
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Last updated Oct 18, 2026.
The Glen/YES 1000FP is a plasma cleaning system designed to accept a range of shelf sizes for changing flat panel industry needs.
The 1000P is a plasma cleaning system with four 16 x 16 inch shelves and a total capacity of 1024 square inches.
The Semitool 11600 SRD is a spin rinse dryer manufactured by Semitool.