EQ 222 SR Spray Solvent

A spray solvent tool is wet process equipment used to apply solvent chemistry onto substrates in a controlled cleaning step. Wet process tools of this class are used to remove films, residues, or contaminants without relying on dry plasma treatment. Spray-based solvent cleaning commonly appears where a process flow needs chemical contact, rinse behavior, and particle control within an enclosed station.

Spray solvent tools generally deliver liquid chemistry through spray nozzles or similar distribution hardware onto the wafer or work surface. Spray solvent tools generally confine the chemical step within a chamber or process area that supports drainage and exhaust. Spray solvent tools commonly sequence solvent application with rinse and drying-related handling so that dissolved residue can be removed from the substrate.

Wet solvent cleaning tools are typically placed in cleaning modules that support lithography, etch, deposition, and rework flows. Spray solvent processing is commonly used after steps that leave organic residue, temporary coatings, or contamination that must be removed before the next operation. A tool in this class often sits between patterning or film-processing steps and subsequent inspection, coating, bonding, or thermal processing.