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Semitool

SSTF 221280 B Spay Solvent

Wet Processing / CleanSemitool SSTF family
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Power

50/60 Hz[1]

Gas delivery

Spay Solvent Tool (SST)[1]

What it is

General reference — not yet source-verified

Spray solvent tools are wet processing systems used to apply solvent chemistry to substrates for cleaning, rinsing, or resist-related removal steps. Wet processing tools of this class typically handle liquid delivery, substrate exposure to chemistry, and controlled drainage within an enclosed process chamber.

How it works

General reference — not yet source-verified

Spray solvent tools generally process substrates by directing solvent through spray hardware onto the work surface, then removing spent liquid from the chamber. Wet cleaning systems of this class commonly combine chemical delivery, containment, and exhaust-compatible enclosure design to support solvent-based process steps.

Where it fits in the process flow

General reference — not yet source-verified

A spray solvent tool fits into the wet processing and clean sequence of semiconductor manufacturing. Equipment in this class is commonly used after steps that leave organic films, residues, or temporary coatings on the substrate, and before downstream inspection, deposition, lithography, or other surface-sensitive operations.

Applications

General reference — not yet source-verified

Spray solvent tools are used for solvent-based cleaning and related wet treatment steps in microfabrication. Equipment in this class can support removal of organic contamination, photoresist residues, edge films, or process byproducts when a solvent process is preferred over an aqueous clean.

What do the numbers mean?

Power & electrical6

50/60 Hz[1]
Accurate?
Phase
3 Phase[2]
Accurate?
30 Amps[2]
Accurate?
Voltage
208 Vac[2]
Accurate?
Electrical configuration
3 Phase - 5 Wire - 30 Amps - 50/60 Hz - 208 Vac[2]
Accurate?
Electrical configuration
5 Wire - 50/60 Hz[1]
Accurate?

Gas & chemistry1

Tool type
Spay Solvent Tool (SST)[1]
Accurate?

Configuration & options5

5 Wire[1]
Accurate?
OEM
Semitool[1]
Accurate?
Model
SSTF 221280 B[1]
Accurate?
Vintage
1997 Vintage[1]
Accurate?
Vintage
1996 Vintage[2]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Configuration50/60 Hz[1]
  • Phase3 Phase[2]
  • Configuration30 Amps[2]
  • Voltage208 Vac[2]
  • Tool typeSpay Solvent Tool (SST)[1]
  • Electrical configuration3 Phase - 5 Wire - 30 Amps - 50/60 Hz - 208 Vac[2]
  • Electrical configuration5 Wire - 50/60 Hz[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What is the equipment type of the Semitool SSTF 221280 B?

The Semitool SSTF 221280 B is a spray solvent tool, and the tool name is also written with the abbreviation SST.[1][2]

Not publicly documented

The following facts about the SSTF 221280 B Spay Solvent are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SSTF 221280 B Spay Solvent are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the SSTF 221280 B Spay Solvent are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the SSTF 221280 B Spay Solvent are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the SSTF 221280 B Spay Solvent are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the SSTF 221280 B Spay Solvent is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
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Last updated Oct 16, 2026.

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