Waferpedia

Semitool

SSTF 221280 PB Spay Solvent

Wet Processing / CleanSemitool SSTF family
Research Quality: 30% complete
Email

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Semitool SSTF 221280 PB is a spray solvent tool (SST) designed for 6-inch wafers. The SSTF 221280 PB operates on 3-phase, 5-wire, 208 Vac power and was built in 1997.[1]

Semitool logo
Fig. — Manufacturer logo, not a photo of this toolWikimedia Commons (see file page for license)

Power

3 Phase[1]

Gas delivery

Spray solvent tool (SST)[1]

What it is

The Semitool SSTF 221280 PB Spay Solvent is a wet processing and cleaning tool. The Semitool SSTF 221280 PB is a spray solvent tool used for cleaning semiconductor wafers. The Semitool SSTF 221280 PB accommodates 6 inch wafers. The Semitool SSTF 221280 PB operates on 3 Phase - 5 Wire - 208 Vac power. The Semitool SSTF 221280 PB was built in 1997.[1][2]

How it works

General reference — not yet source-verified

Spray solvent tools generally deliver liquid chemicals onto wafer surfaces in a controlled spray process. Wet cleaning systems of this class are designed to expose the wafer surface to cleaning media, carry away loosened contamination, and prepare the wafer for the next process step. Tool operation in this class commonly centers on chemical application, fluid handling, and post-clean wafer condition control.

Where it fits in the process flow

General reference — not yet source-verified

Wet processing and cleaning tools sit between patterning, deposition, etch, implant, or other wafer fabrication steps that leave residues or particles needing removal. A spray solvent tool is used when the process flow calls for solvent cleaning before a subsequent module that depends on a cleaner wafer surface. Such equipment supports line integration by reducing contamination carryover from one operation to the next.

Applications

The Semitool SSTF 221280 PB is used for cleaning semiconductor wafers.[2]

What do the numbers mean?

Power & electrical3

Phase
3 Phase[1]
Accurate?
Voltage
208 Vac[1]
Accurate?
Power
3 Phase - 5 Wire - 208 Vac[1]
Accurate?

Wafer handling1

Wafer Sizes
6 inch[1]
Accurate?

Gas & chemistry1

Tool type
Spray solvent tool (SST)[1]
Accurate?

Configuration & options5

5 Wire[1]
Accurate?
Make
Semitool[1]
Accurate?
Model
SSTF 221280 PB[1]
Accurate?
Vintage
1997[1]
Accurate?
Category
Wet Processing / Clean[2]
Accurate?
Interested in this tool?
Need help with this tool?Embed spec card

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Phase3 Phase[1]
  • Voltage208 Vac[1]
  • Power3 Phase - 5 Wire - 208 Vac[1]
  • Tool typeSpray solvent tool (SST)[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Worked with this tool? Help preserve its knowledge →

Frequently asked questions

What is the model designation?

The model designation is SSTF 221280 PB.[2][1]

What type of equipment is the Semitool SSTF 221280 PB?

The Semitool SSTF 221280 PB is a spray solvent tool in the wet processing and clean category.[2][1]

What wafer size does the Semitool SSTF 221280 PB accommodate?

The Semitool SSTF 221280 PB accommodates 6 inch wafers.[1][2]

What electrical configuration does the Semitool SSTF 221280 PB use?

The Semitool SSTF 221280 PB uses 3 Phase - 5 Wire - 208 Vac power.[1][2]

What build year is given for the Semitool SSTF 221280 PB?

The Semitool SSTF 221280 PB was built in 1997.[1][2]

Not publicly documented

The following facts about the SSTF 221280 PB Spay Solvent are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SSTF 221280 PB Spay Solvent are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the SSTF 221280 PB Spay Solvent are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the SSTF 221280 PB Spay Solvent are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the SSTF 221280 PB Spay Solvent are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the SSTF 221280 PB Spay Solvent is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.com — waferpedia.comwaferpedia.com
Was this page accurate?

Last updated Oct 19, 2026.

Compare with similar tools

View all →