SMC
HRW 008 HS CZ Thermo Chiller
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
How it works
Where it fits in the process flow
General reference — not yet source-verifiedThermo chillers sit alongside production or laboratory tools as utility support equipment rather than as direct wafer processing chambers. Thermo chillers typically connect to temperature sensitive subsystems before operation and remain in service during process, metrology, test, or support activity.
Applications
General reference — not yet source-verifiedThermo chillers are used wherever semiconductor or laboratory equipment needs controlled heat removal from a recirculating liquid loop. Thermo chillers commonly support stable operation of tool modules whose performance, repeatability, or reliability depends on holding hardware near a target temperature.
What do the numbers mean?
Power & electrical4
Configuration & options2
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the HRW 008 HS CZ Thermo Chiller are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the HRW 008 HS CZ Thermo Chiller are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the HRW 008 HS CZ Thermo Chiller are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the HRW 008 HS CZ Thermo Chiller are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the HRW 008 HS CZ Thermo Chiller are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the HRW 008 HS CZ Thermo Chiller is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]HRW 008 HS CZ Thermo Chiller — SMC | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
- [4]SMC HRW 008 HS CZ Thermo Chiller family | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 20, 2026.
Compare with similar tools
View all →
The Applied Materials 0010-13627 is a high efficiency RF match designed for semiconductor equipment.
General referenceThe Applied Materials 0015 20064 Part is an identified component within the lab and support equipment category, used in a supporting role around semiconductor manufacturing and processing tools.
Applied Materials 0020 19652 is a retainer bracket, top match part described as for 200mm Ultim.