SUSS MicroTec

AS 8 Spray

Research Quality: 30% complete

What is it?

The SUSS AS 8 Spray Coater is a semi-automatic spray coater for substrates up to 200mm or 300mm in diameter and square substrates up to 6 inches edge length.

What do the numbers mean?

Power & electrical1

Power Supply^[1]

Accurate?

Wafer handling3

Supports substrates up to 200mm or 300mm in diameter, and square substrates up to 6" edge length^[1]

Accurate?

Recipe Transferability^[1]

Accurate?

Process Kit Parts Plate and Chuck^[1]

Accurate?

Gas & chemistry1

Conformal Coating: ensures top edge coverage while avoiding resist accumulation in trenches^[1]

Control & software2

Touchscreen Interface: equipped with MMC controller software^[1]
Programmable Recipes: all spray and cleaning parameters can be customized and saved^[1]

Configuration & options12

Semi Automatic^[1]
Dual Dispense System: up to two separate spray dispense system to prevent cross-contamination^[1]; Uniform Coating^[1]; Proprietary Spray Design^[1]; Low Viscosity Solutions^[1]; With:^[1]; Process Ring^[1]; Display / GUI^[1]; Keyboard, Mouse Pad^[1]; Spanner Wrench^[1]; Ionizer^[1]; Power Box Wall Mount (x5)^[1]

Interested in this tool?

Embed spec card

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Conformal Coatingensures top edge coverage while avoiding resist accumulation in trenches^[1]
ConfigurationPower Supply^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the AS 8 Spray are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the AS 8 Spray are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the AS 8 Spray are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the AS 8 Spray are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the AS 8 Spray are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the AS 8 Spray is not on record.
Answerable by: an OEM datasheet or a fab qualification report