SVG
86
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The SVG 86 is a coater/developer photoresist track. The SVG 86 is a belted-carriage system capable of processing round and square wafers from 2 inches to 200mm. The SVG 86 features robotic wafer handling and PC-based graphical user programming with touch screen control.[1]
What it is
General reference — not yet source-verifiedA resist processing track is an automated wafer tool used around photolithography to apply photoresist and to carry out related wet and thermal preparation steps. Resist tracks are part of the front-end patterning flow and are typically organized as linked modules that move wafers between dispense, spin, bake, chill, and develop functions under recipe control.
Where it fits in the process flow
General reference — not yet source-verifiedA resist processing track sits directly around the lithography exposure operation in semiconductor manufacturing. The coat portion prepares wafers before exposure by applying photoresist and associated conditioning steps, and the develop portion processes the latent image after exposure so the patterned resist can serve as a mask for later etch, implant, plating, or deposition sequences.
What do the numbers mean?
Wafer handling5
Gas & chemistry4
- Track configuration
- Track 1: Sender - Coat - Receiver; Track 2: Sender - Developer - Receiver[2]
Control & software4
Configuration & options3
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the track configuration of the SVG 86?
The SVG 86 has two tracks: Track 1 consists of a sender, a coat module, and a receiver; Track 2 consists of a sender, a developer module, and a receiver.[2]
What wafer sizes can the SVG 86 process?
The SVG 86 can process round and square wafers ranging in size from 2 inches to 200 millimeters.[1]
What type of wafer handling does the SVG 86 use?
The system features robotic wafer handling.[1]
Does the SVG 86 support recipe management software?
Yes, it can run Nettrack recipe management software, which provides wafer and lot tracking and helps eliminate recipe errors.[1]
Not publicly documented
The following facts about the 86 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 86 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 86 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 86 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 86 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 86 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]ltnsemi.com — ltnsemi.comltnsemi.com
- [2]inventory listing
Last updated Oct 16, 2026.
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