Tokyo Electron
Mark VIII
What is it?
What do the numbers mean?
Gas & chemistry6
Configuration & options19
- 2 develop, 1 coat, 3 chill hot plates, 4 low temp hot plates, 1 high temp hot plate, WEE - Main Frame: Single Block[1]
- 2 develop cups, 1 coat cup, 4 chill hot plates, 3 chill plates, 3 low temp hot plates, WEE Right[2]
- 1C, 2D, 1WEE, 3HP, 4 CHP, 3 COL - Main Frame: Dual Block[2]
- 2 develop cups, 2 chill plates, 4 chill hot plates, 4 low temp hot plates, WEE[3]
- Right[3]
- 2 develop cups, 9 Low temp Hot plates, 3 chill plates, WEE[4]
- 2 coat cups, 1 adhesion hot plates, 2 DHP, 6 Low temp hot plate, 3 chill plates[5]
- Left[5]
- 2C, 1AD, 2DHP, 6HP, 3COL - Main Frame: Single Block - LD: 3ea, modified to Fortrend[5]
- 2 coat cups, 2 adhesion Hot plates, 6 low temp hot plates, 3 chill plates[6]
- 2C, 2AD, 6HP, 3 COL - Main Frame: Single Block - LD: 3ea, modified to Fortrend[6]
- 2 coat cups, 2 adhesion Hot plates, 6 low temp hot plates, 3 chill plates Right[7]
- 3 develop, 2 coat cups - 2C, 2D, 1 WEE, 1AD, 2DHP, 6HP, 4 COL, 1 EXT - Main Frame: Dual Block[8]
- 2 develop, WEE, 2 low temp hot plate, 1 chill plate Left[9]
- Low temp hot plate[10]
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Tel Mark VIII Developer | — | 1998 | 2 develop cups, 2 chill plates, 4 chill hot plates, 4 low temp hot plates, WEE Right; main frame: Dual Block; gas: TMAH; OS: DOS | Equipment inventory listing[3] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the Mark VIII are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Mark VIII are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Mark VIII are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Mark VIII are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Mark VIII is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Mark VIII are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (11)Every fact above is drawn from these public sources
- [1]inventory listing
- [2]inventory listing
- [3]inventory listing
- [4]inventory listing
- [5]inventory listing
- [6]inventory listing
- [7]inventory listing
- [8]inventory listing
- [9]inventory listing
- [10]inventory listing
- [11]Equipment inventory listing
Last updated Jul 29, 2026.
