PRC 012 AS Dry

The Ulvac PRC 012 AS Dry belongs to the class of dry vacuum pumps used to evacuate air and process gases from chambers, load spaces, lines, and ancillary equipment. In laboratory and semiconductor support settings, machines of this class serve as utility components rather than primary process tools, creating the backing or roughing vacuum needed by instruments and vacuum systems.

Machines of this class remove gas by mechanically capturing and compressing it through a dry internal pumping mechanism, then discharging it to exhaust without using sealing oil in the gas path. The absence of oil in the swept volume helps limit contamination of the chamber and process line, which is important where cleanliness, sample integrity, or downstream vacuum performance matters.

In typical use, such systems are connected to a chamber or manifold through valves and foreline plumbing. The pump lowers pressure from ambient conditions into the rough-vacuum region and may operate alone for general evacuation or in combination with a higher-vacuum pump as backing support. Routine operation often includes gas ballast or purge functions, isolation and vent control, and exhaust management appropriate to the gases being handled.