Waferpedia

Woollam

M-2000D

WoollamM-2000D
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What is it?

The source identifies this equipment as a J.A. Woollam M-2000D Spectroscopic Ellipsometer in horizontal mode, with vertical mode available by check with staff. It is described as a fully automated measurement tool with mapping functionality, variable incidence angle, and an 8 in (190-1600 nm) specification.

What can it run?

Process applications and technology nodes documented for this tool.

  • Optical properties of thin film semiconductor materials

What do the numbers mean?

Optics & imaging1

Measurement application
Measures optical properties of thin film semiconductor materials[1]
Accurate?

Configuration & options9

OEM
J.A. Woollam[1]
Accurate?
Model
M-2000D[1]
Accurate?
Category
Spectroscopic ellipsometer[1]
Accurate?
Mode
Horizontal mode[1]
Accurate?
Mode option
Vertical mode available by check with John Abrahams[1]
Accurate?
Automation
Fully automated measurement tool[1]
Accurate?
Functionality
Mapping functionality[1]
Accurate?
Incidence angle
Can be varied; typical measurements are made from 60 to 85[1]
Accurate?
Measured properties
Complex refractive index or dielectric function[1]
Accurate?
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Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the M-2000D are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the M-2000D are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the M-2000D are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the M-2000D are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the M-2000D are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the M-2000D is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]nanocenter.umd.edunanocenter.umd.edunanocenter.umd.edu
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Last updated Jul 29, 2026.