Yaskawa
XU RC 350 D K 01+ERCR RS 09 A 003 Atmospheric Wafer Robot
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
How it works
General reference — not yet source-verifiedAtmospheric wafer robots generally use motorized axes and an end effector to pick, carry, and place wafers between defined positions. Atmospheric wafer robots typically operate under tool control with position teaching, interlocks, and handoff routines that coordinate motion with doors, sensors, and station readiness.
Where it fits in the process flow
General reference — not yet source-verifiedAtmospheric wafer robots are used in tool architectures where wafers are transferred in ambient or controlled clean air rather than through vacuum chambers. Atmospheric wafer robots commonly sit between cassette or front-end interfaces and process modules, serving as the internal transport element that connects loading to processing and unloading.
Applications
General reference — not yet source-verifiedAtmospheric wafer robots are applied wherever semiconductor wafers need repeatable noncontact or low-contact movement within support and process equipment. Atmospheric wafer robots are used to automate substrate transfer, align handling sequences with station timing, and reduce manual wafer handling in laboratory and production-support settings.
What do the numbers mean?
Wafer handling2
Configuration & options4
- Compatible with DNS SU 3100[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What type of equipment is the Yaskawa XU RC 350 D K 01+ERCR RS 09 A 003?
The Yaskawa XU RC 350 D K 01+ERCR RS 09 A 003 is an atmospheric wafer robot.[1]
What wafer size does the Yaskawa XU RC 350 D K 01+ERCR RS 09 A 003 support?
The Yaskawa XU RC 350 D K 01+ERCR RS 09 A 003 supports 12 inch wafers.[1]
Is the Yaskawa XU RC 350 D K 01+ERCR RS 09 A 003 compatible with DNS SU 3100?
The Yaskawa XU RC 350 D K 01+ERCR RS 09 A 003 is compatible with DNS SU 3100.[1]
Not publicly documented
The following facts about the XU RC 350 D K 01+ERCR RS 09 A 003 Atmospheric Wafer Robot are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the XU RC 350 D K 01+ERCR RS 09 A 003 Atmospheric Wafer Robot are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the XU RC 350 D K 01+ERCR RS 09 A 003 Atmospheric Wafer Robot are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the XU RC 350 D K 01+ERCR RS 09 A 003 Atmospheric Wafer Robot are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the XU RC 350 D K 01+ERCR RS 09 A 003 Atmospheric Wafer Robot are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the XU RC 350 D K 01+ERCR RS 09 A 003 Atmospheric Wafer Robot is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]inventory listing
Last updated Oct 16, 2026.
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